| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measuring instrument and a film thickness measuring method for a belt capable of measuring continuously a film thickness without stopping a measured object. SOLUTION: The first shaft 14 abutting to a belt 12 inner circumferential face and the first idler 18 abutting on a belt outer circumferential face are rotated when the second shaft 16 is rotation-driven to rotate the belt 12. An angular velocity due to the rotation of the first shaft 14 is detected by the first angular velocity meter 20A, and a moving velocity of the belt inner circumferential face is calculated by a belt inner and outer circumferential face velocity calculating part 22, based on an known outside diameter of the first shaft 14. An angular velocity due to the rotation of the first idler 18 is further detected by the second angular velocity meter 20B, and a moving velocity of the belt outer circumferential face is calculated by the belt inner and outer circumferential face velocity calculating part 22, based on a known outside diameter of the idler 18. The film thickness of the belt is calculated by a belt thickness calculation part 24, based on a moving velocity difference between the velocities of belt inner and outer circumferences calculated by the belt inner and outer circumferential face velocity calculating part 22. COPYRIGHT: (C)2007,JPO&INPIT
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