| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon/silicon carbide composite material having improved mechanical properties such as strength and toughness and improved high durability, and whose reliability is high. SOLUTION: Regarding the silicon/silicon carbide composite material, in silicon/silicon carbide in which silicon is present in the gaps of silicon carbide particles, each silicon carbide particle has two particle diameter distributions, and the average fine pore diameter obtained by removing silicon is 0.03 to 1.5μm. COPYRIGHT: (C)2007,JPO&INPIT
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