| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater capable of sorting stopping of a slit nozzle and removal of a foreign matter according to a size of the foreign matter. SOLUTION: When a surface of a glass substrate W is coated with a coating liquid from a delivery port at a lower end of the slit nozzle 14 while moving a gate type movement mechanism 3 in a right direction in Fig. by driving a linear motor, when the foreign matter G1 having a diameter dimension capable of being sensed by a sensor 17 is deposited on the substrate W at a front side in a traveling direction, the sensor 17 outputs a stop signal to the linear motor when the sensor 17 senses it and traveling of the gate type movement mechanism 3 is immediately stopped. Whereas, when the foreign matter G2 having a diameter dimension capable of being not sensed by the sensor 17 is deposited on the substrate W at a front side in the traveling direction, since the stop signal is not output to the linear motor, the gate type movement mechanism 3 travels as it is. Further, the foreign matter G2 is not removed by a protector 15. Further, when the dimension of the foreign matter G2 is extremely small, it cannot be removed by the protector 15, however, in this case, there is no fear that the slit nozzle 14 is damaged. COPYRIGHT: (C)2007,JPO&INPIT
|
