发明名称 |
Methods for integrating lattice-mismatched semiconductor structure on insulators |
摘要 |
Monolithic lattice-mismatched semiconductor heterostructures are fabricated by bonding patterned substrates with alternative active-area materials formed thereon to a rigid dielectric platform and then removing the highly-defective interface areas along with the underlying substrates to produce alternative active-area regions disposed over the insulator and substantially exhausted of misfit and threading dislocations.
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申请公布号 |
US2007054467(A1) |
申请公布日期 |
2007.03.08 |
申请号 |
US20050221064 |
申请日期 |
2005.09.07 |
申请人 |
AMBERWAVE SYSTEMS CORPORATION |
发明人 |
CURRIE MATTHEW T.;LOCHTEFELD ANTHONY J.;CHENG ZHIYUAN;LANGDO THOMAS A. |
分类号 |
H01L21/30 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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