| 摘要 |
A method for conditioning a heater of a CVD chamber by forming a pre-coating layer on the surface of the heater is provided. Hence, the surface condition of the heater is improved for better thermal efficiency and the surface of the heater is protected from the possible damages of the cleaning gases. Therefore, the lifetime of the heater becomes longer and costs and recovery time for the preventive maintenance of the CVD system can be reduced.
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