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发明名称
Mikro-elektromechanischer (MEM) optischer Resonator und Verfahren
摘要
申请公布号
DE69836448(T2)
申请公布日期
2007.03.08
申请号
DE19986036448T
申请日期
1998.04.27
申请人
ROCKWELL INTERNATIONAL CORP.
发明人
MOTAMEDI, EDWARD M.;ANDREWS, ANGUS P.;PARK, SANGTAE
分类号
G02B26/08;B81B3/00;G02B26/10;G06K7/10;H01L21/308;H01L41/09;H01L41/18
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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