| 摘要 |
PROBLEM TO BE SOLVED: To provide a board inspection device capable of improving the precision of board temperature upon imparting the temperature previous to the inspection, and the temperature maintenance mechanism for the same. SOLUTION: The board inspection device comprises a plurality of mounting position on which the inspection board 8 is to be mounted, the cooling part 22 surrounded by the side wall part 223, the cooler for cooling the cooling part 22; the moveable probes 37 and 38 for inspecting the board 8, the guide rail 41 for moving the cooling part 22, the cover 26 for covering the plurality of mounting position at the temperature imparting position, and the fixed cover 28 for covering the plurality of mounting positions on the moving path from the temperature imparting position to the inspection position. The fixed cover 28 includes one opening part 283 for one mounting position, and the plurality of mounting positions are moved so as to successively oppose to the inspection opening 283. The movable probes 37 and 38 inspect the board 8 mounted on the plurality of mounting positions through the opening 283 for inspection. COPYRIGHT: (C)2007,JPO&INPIT
|
