发明名称 |
COMPLIMENTARY NITRIDE TRANSISTORS VERTICAL AND COMMON DRAIN |
摘要 |
A semiconductor device and a method for manufacturing the device are disclosed in which the semiconductor device includes ohmic contacts (28,46) on different planes and the method for manufacturing the device includes etching a semiconductor stack of different conductivity semiconductor layers in successive steps to create a first opening(16)of a first width in a first semiconductor layer(44) to expose another semiconductor layer, and then a second opening of a narrower width in the another layer, whereby a portion of the another layer remains exposed for receiving an ohmic contact.
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申请公布号 |
WO2005079366(B1) |
申请公布日期 |
2007.03.08 |
申请号 |
WO2005US04610 |
申请日期 |
2005.02.14 |
申请人 |
INTERNATIONAL RECTIFIER CORPORATION;BEACH, ROBERT;BRIDGER, PAUL |
发明人 |
BEACH, ROBERT;BRIDGER, PAUL |
分类号 |
H01L29/76;H01L21/336;H01L21/8238;H01L27/06;H01L29/20;H01L29/94;H01L31/062;H01L31/113;H01L31/119 |
主分类号 |
H01L29/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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