| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device capable of detecting fine refuse adhering onto the surface of a work. SOLUTION: This surface inspection device is used for detecting refuse (foreign substance) adhering onto the inspection surface of the work. An illumination part irradiates illumination light approximately in the horizontal direction of the inspection surface of the work. The first mask part is arranged on an upper part of the inspection surface, and the second mask part is arranged on a lower part of the inspection surface. Namely, the upper part and the lower part are sandwiched by the first mask part and the second mask part. Since the first mask part and the second mask part block light with which the inspection surface of the work is irradiated from the outside, the inspection surface of the work is hardly irradiated with light. Namely, almost no light is transmitted through the inspection surface of the work. Consequently, light entering an imaging part provided on a position opposite to the inspection surface is regarded as only light reflected by refuse adhering onto the inspection surface of the work. Hereby, fine-sized refuse can be detected easily. COPYRIGHT: (C)2007,JPO&INPIT
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