LACTONE COPOLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION,申请号IL20060179069-传众专利搜索

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发明名称	LACTONE COPOLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION
摘要
申请公布号	IL179069(D0)	申请公布日期	2007.03.08
申请号	IL20060179069	申请日期	2006.11.06
申请人	JSR CORPORATION	发明人
分类号	C08F;C08F220/28;G03F7/004;G03F7/033;G03F7/039;H01L21/027	主分类号	C08F
代理机构		代理人
主权项
地址

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