| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element and piezoelectric vibrator not forming twin crystal. SOLUTION: The pressure sensor element 10 is formed in a disk shape so that the main plane 11 is to be X-plane. The main plane 11 means an annular plane (YZ-plane) including the diameter of the disk shape. Therefore, the pressure sensor element 10 is formed so that the thickness direction becomes the X-axis, and the main plane 11 becomes the X-plane, that is, the YZ-plane. On this main plane 11, an electrode (not shown in figure) is formed and a charge caused by pressure on the main plane 11 can be detected. COPYRIGHT: (C)2007,JPO&INPIT
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