CHAMBER FOR VACUUM TREATMENT

摘要

A chamber for vacuum treatment enabling the simplification of the arrangement structure of a flow passage for cooling. The chamber for vacuum treatment comprises a plurality of wall members (1, 2, 3, 4, 11, 12, 13). Parts of the surfaces of the wall members (1, 2, 3, 4, 11, 12, 13) form bonded surfaces, and the plurality of wall members (1, 2, 3, 4, 11, 12, 13) are bonded to each other through bonding parts (10) formed by bonding airtight the bonded surfaces to each other to form a chamber body (100). At least parts of the bonding parts (10) are the bonding parts (10) with built-in spaces in which clearances (30, 31) extending along the bonded surfaces are formed in the bonded surfaces, and the peripheries of the bonded surfaces are bonded airtight to each other by welding.