LIFT FINGER OF WAFER LIFT UNIT

摘要

A lift finger of a wafer lift unit is provided to prevent damage of a wafer and process defect by realigning a loaded wafer having a distorted alignment and placing it on a wafer supporter. A wafer realignment unit(112) is formed on an upper portion of the body and realigns a loaded wafer(W) having a distorted alignment. A wafer placing unit(120) is horizontally projected from a front end of the body. A connecting unit(130) is horizontally projected from a rear end of the body. The connecting unit has a screw coupling hole to be connected to a lift. The wafer realignment unit is a sloping unit. The sloping unit is formed to slide an edge of the connected wafer and make the edge unit of the wafer be placed on the wafer placing unit.