| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of shortening a processing time when the lattice constant or lattice strain quantity of a crystal is measured and analyzed on the basis of a high-order Laue zone (HOLZ) line appearing in a converged electron beam diffraction (CBED) image. SOLUTION: In this analyzing method of a crystal structure for calculating a lattice constant on the basis of the HOLZ line obtained from a CBED image using a data processor, the lattice constant is used as a parameter and the factor effect figure of the distance between the crossing points of the HOLZ line is formed by simulation using a parameter planning technique and the equation having the lattice constant as the parameter is formed from the formed factor effect figure and the distance between crossing points of the observed actual HOLZ line is substituted for the formed equation to calculate the lattice constant. COPYRIGHT: (C)2007,JPO&INPIT
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