| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring a thickness of a sheet-like object, which precisely measures the thickness of the sheet-like object. SOLUTION: An X-ray tube unit 2 which is composed of a plurality of X-ray tubes 8 arranged annularly at a prescribed pitch P, and an X-ray detecting unit 4 which is composed of a plurality of X-ray detectors 9 arranged annularly so as to be opposite to the X-ray tubes 8, are rotated in synchronization with each other in their opposite state while sandwiching the sheet-like object 1, whereby the thickness of the sheet-like object 1 is measured, and a thickness of a calibration-use reference body 6 is measured at an orbit deviating from the sheet-like object. The thickness of the reference body 6 is compared with a reference value by a compensation operating section 12 in order to obtain a compensation value, and the measured thickness of the sheet-like object 1 is compensated by reflecting the compensation value. COPYRIGHT: (C)2007,JPO&INPIT
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