发明名称 Use of nanoscale particles for creating scratch-resistant protective layers on semiconductor chips
摘要 Inorganic-based nanoparticles, such as nanoparticles based on silicon dioxide, are used in order to produce protective layers for semiconductor chips having scratch-resistant properties. The nanoparticles are preferably processed to form a sol, which is applied onto the semiconductor chips to be coated and subsequently converted by sintering into the protective layer.
申请公布号 US2007052052(A1) 申请公布日期 2007.03.08
申请号 US20060526862 申请日期 2006.09.26
申请人 THEUSS HORST 发明人 THEUSS HORST
分类号 H01L31/00;H01L23/28;H01L23/29 主分类号 H01L31/00
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