| 发明名称 |
METHOD FOR SELECTIVE COATING OF A COMPOSITE SURFACE PRODUCTION OF MICROELECTRONIC INTERCONNECTIONS USING SAID METHOD AND INTEGRATED CIRCUITS |
| 摘要 |
<p>The present invention relates to a process for selectively coating certain areas of a composite surface with a conductive film, to a process for fabricating interconnects in microelectronics, and to processes and methods for fabricating integrated circuits, and more particularly to the formation of networks of metal interconnects, and also to processes and methods for fabricating microsystems and connectors.</p> |
| 申请公布号 |
EP1759038(A2) |
申请公布日期 |
2007.03.07 |
| 申请号 |
EP20050743018 |
申请日期 |
2005.03.22 |
| 申请人 |
ALCHIMER S.A. |
发明人 |
BUREAU, CHRISTOPHE;AMEUR, SAMI |
| 分类号 |
C23C18/16;B05B1/34;B05B11/00;B05B11/04;C23C18/30;C23C18/31;H01L21/288;H01L21/768 |
主分类号 |
C23C18/16 |
| 代理机构 |
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