METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION

摘要

A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma ( 22 ) is ignited in a gaseous medium between at least two electrodes ( 14, 16 ) in a discharge space ( 12 ), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt ( 24 ), which is applied to a surface in said discharge space ( 12 ) and at least partially evaporated by an energy beam, in particular by a laser beam ( 20 ).