发明名称 |
Method for fabricating a pole tip in a magnetic transducer |
摘要 |
A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
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申请公布号 |
US7186348(B2) |
申请公布日期 |
2007.03.06 |
申请号 |
US20040882883 |
申请日期 |
2004.06.30 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
CHEN TSUNG YUAN;DRUIST DAVID PATRICK;LE QUANG;LEE KIM Y.;WANG CHUN-MING;ZOLLA HOWARD GORDON |
分类号 |
G11B5/187 |
主分类号 |
G11B5/187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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