发明名称 Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
摘要 A method for measuring the cavity length of a remote sensing interferometer by locally replicating the state of the remote sensing interferometer by way of a local interferometer. The local interferometer is produced by micro-electromechanical micro machining techniques, thus obtaining a highly accurate and reliable fiber optic sensing at a cost comparable to electronic sensing devices.
申请公布号 US7187453(B2) 申请公布日期 2007.03.06
申请号 US20040829980 申请日期 2004.04.23
申请人 OPSENS INC. 发明人 BELLEVILLE CLAUDE
分类号 G01B11/02;G01B9/02;G01J3/02;G01J3/26;G02B26/00 主分类号 G01B11/02
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