| 摘要 |
PROBLEM TO BE SOLVED: To obtain a metal mask for crystal electrode deposition which has no washing stain after drying by improving removal of washing liquid when a crystal plate is washed. SOLUTION: The metal mask for crystal electrode deposition comprising a lower frame tool having an opening part in which a magnet is buried, a lower electrode metal mask having an electrode pattern opening part, an intermediate plate having an opening part in which the crystal plate is charged, and an upper metal mask having an electrode pattern opening part is constituted by burying many shape memory alloys in the intermediate plate. COPYRIGHT: (C)2007,JPO&INPIT
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