| 摘要 |
PROBLEM TO BE SOLVED: To enhance the necessity of ultra-fineness of grain size of crystal particle of a dielectric material by remarkable reduction in size of a capacity formed of a dielectric material and a couple of electrodes holding the same dielectric material. SOLUTION: A texture formed of a plurality of striped traces are formed to define the regions in a capacitor where a dielectric material and an upper electrode and a lower electrode holding the same dielectric material are provided on a substrate. Accordingly, the crystal particle of dielectric material grows in the regions defined with the striped traces. As a result, crystal grain size is likely to become equal to or smaller than the area of the region in higher possibility. Therefore, the crystal grain size of dielectric material can further be reduced. COPYRIGHT: (C)2007,JPO&INPIT
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