| 摘要 |
PROBLEM TO BE SOLVED: To form a plated film having adequate characteristics and reliability by inhibiting a plating solution from deteriorating. SOLUTION: This electroless plating apparatus comprises: a plating-solution circulation system 350 provided with a plating-solution supply pipe 308 for supplying the plating solution in a plating solution storage tank 302 to a plating tank 200, and with a plating-solution-recovering pipe 310 for returning the plating solution in the plating tank 200 to the plating solution storage tank 302; and heat insulation parts 272a, 272b, 352 and 356 for inhibiting the fall of a temperature of the plating solution in the whole plating-solution circulation system 350. COPYRIGHT: (C)2007,JPO&INPIT
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