| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic metal compound supplying vessel for attaining quantity of vaporization of an organic metal compound having a constant reproducibility, and for reducing drop of usage of the organic metal compound as a filler when quantity of vaporization of the organic metal compound by increasing a flow rate of the carrier gas. SOLUTION: In the organic metal compound supplying vessel, an end of a carrier gas introducing pipe is provided at the upper part of the vessel, an end part of the carrier gas exhausting pipe is provided at the bottom thereof, and the vessel is filled with a carrier supporting organic metal compound in which the carrier which is inactive to the organic metal compound is covered with the organic metal compound in the solid state under the normal temperature. The end of the carrier gas introducing pipe is specifically arranged with inclination of 20 to 50°in the diagonal lower direction for the horizontal direction. COPYRIGHT: (C)2007,JPO&INPIT
|
