| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for forming an aerosol with uniform impact force and physically cleaning. SOLUTION: An aerosol cleaning method includes a first cooling step of pre-cooling a chemically inert working medium gas which can contain an impurity gas for liquefying or solidifying the impurity gas, while keeping the working medium gas in a gas phase; a step of accepting the pre-cooled working medium gas, and removing liquefied or solidified impurities; a second cooling step of accepting the working medium gas with the impurities removed, and further secondarily cooling; and a cleaning step of accepting the secondarily cooled working medium, jetting it from a nozzle into a low pressure atmosphere to form the aerosol, and spraying the aerosol to an object to be cleaned for cleaning it. COPYRIGHT: (C)2007,JPO&INPIT
|
