发明名称 |
Production unit for semiconductor device and devices has chip test section, information memory, template printer and print head and chip coordinate recognition section and control section |
摘要 |
<p>A production unit for a semiconductor device comprises a wafer test section (100) to determine the properties of chips on a wafer and a template to trim chips according to the test data. There is a test data memory (120), a display pattern print section (11) for each chip and a print head (111) that injects at least one conductor, insulator and boundary processing solution. A chip coordinate recognition section (112) and control section (113) control the print head based on the test data, memory and chip coordinate. Independent claims are also included for the following: (A) A device as above; (B) An IGBT chip: (C) A non-volatile memory; (D) An integrated high-voltage circuit;and (E) Production processes for the above.</p> |
申请公布号 |
DE102006032730(A1) |
申请公布日期 |
2007.03.01 |
申请号 |
DE20061032730 |
申请日期 |
2006.07.14 |
申请人 |
MITSUBISHI DENKI K.K. |
发明人 |
SHIMIZU, KAZUHIRO;AKIYAMA, HAJIME;YASUDA, NAOKI |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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