| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a potential measurement device and potential measurement method, capable of correcting the error components of detection signal for potential measurement of a measuring object surface. <P>SOLUTION: The potential measurement device comprises a capacitance-varying means 103 for varying the capacitance between the surface of a measuring object 101 and a detection electrode 102; the detection means 104 for detecting the charge amount, statically introduced to the detection electrode 102; and a shielding means 105 for selectively making the shielding state of the detection electrode 102 generated from the electric lines of force generated from the surface of the measuring object 101 to the detection electrode 102, for making the incident electric lines of force to the detection electrode 102 fixed for longer than a certain interval, and not shielding state of the detection electrode 102 from the electric lines of force generated from the surface of the measurement object 101 to the detection electrode 102. <P>COPYRIGHT: (C)2007,JPO&INPIT |
