发明名称 Polishing composition
摘要 A polishing composition containing a silica, an acid, a surfactant, and water, wherein (a) the acid has solubility in water at 25° C. of 1 g or more per 100 g of an aqueous saturated solution; (b) the surfactant is a sulfonic acid represented by the formula (1) or (2), or a salt thereof; and (c) the polishing composition has a pH of a specified range; and a polishing process of a substrate using the polishing composition are provided. The polishing composition is suitably used, for example in polishing a substrate for disk recording media such as magnetic disks, optical disks and opto-magnetic disks.
申请公布号 US2007044386(A1) 申请公布日期 2007.03.01
申请号 US20060510707 申请日期 2006.08.28
申请人 KAO CORPORATION 发明人 YAMAGUCHI NORIHITO
分类号 B24D3/02;B24B7/30 主分类号 B24D3/02
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