CONTAINER FOR SEMICONDUCTOR HEATER

摘要

PROBLEM TO BE SOLVED: To provide a container for heater ensuring excellent soaking properties of a heater and excellent temperature rise/fall characteristics by preventing the effect of heat when the heater is heated, and suitably used as a coater developer employed especially in photolithography process. SOLUTION: The container 1 for containing and supporting a heater 2 for heating a semiconductor has an opening in which the heater 2 can be installed, and the heat capacity of the container 1 is within 1.5 times that of the heater 2. The heat capacity of the container 1 is preferably equal to or lower than that of the heater 2, or is preferably 0.2 times or more that of the heater 2. COPYRIGHT: (C)2007,JPO&INPIT