Multilayer coatings for environmentally sensitive devices including a plasma protective layer

摘要

A multilayer coating for an environmentally sensitive device, such as an OLED, is provided. The multilayer coating includes a plasma protective layer configured to be placed onto said device; and a stack placed onto said plasma protective layer, said stack comprising at least one organic layer and at least one inorganic layer, said plasma protective layer configured such that upon deposition of said stack thereon, damage to said device caused by a plasma used to deposit said stack is significantly reduced relative to such a device coated by said stack without said plasma protective layer. Encapsulated devices and methods for encapsulation of devices with multilayer coatings including a plasma protective layer are further provided.