发明名称 |
Piezoelectric array with strain dependant conducting elements and method therefor |
摘要 |
A structure (and method) for a piezoelectric device, including a layer of piezoelectric material. A nanotube structure is mounted such that a change of shape of the piezoelectric material causes a change in a stress in the nanotube structure.
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申请公布号 |
US7183568(B2) |
申请公布日期 |
2007.02.27 |
申请号 |
US20020326172 |
申请日期 |
2002.12.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
APPENZELLER JOERG;AVOURIS PHAEDON;MARTEL RICHARD;MISEWICH JAMES ANTHONY;SCHROTT ALEJANDRO GABRIEL |
分类号 |
B82B1/00;H01L29/06;G11C13/02;H01L27/10;H01L27/20;H01L41/09;H01L41/18;H01L41/187;H01L41/22 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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