发明名称 Piezoelectric array with strain dependant conducting elements and method therefor
摘要 A structure (and method) for a piezoelectric device, including a layer of piezoelectric material. A nanotube structure is mounted such that a change of shape of the piezoelectric material causes a change in a stress in the nanotube structure.
申请公布号 US7183568(B2) 申请公布日期 2007.02.27
申请号 US20020326172 申请日期 2002.12.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 APPENZELLER JOERG;AVOURIS PHAEDON;MARTEL RICHARD;MISEWICH JAMES ANTHONY;SCHROTT ALEJANDRO GABRIEL
分类号 B82B1/00;H01L29/06;G11C13/02;H01L27/10;H01L27/20;H01L41/09;H01L41/18;H01L41/187;H01L41/22 主分类号 B82B1/00
代理机构 代理人
主权项
地址