| 发明名称 |
Physical nano-machining with a scanning probe system for integrated circuit modification |
| 摘要 |
Nano-machining for circuit edits through the front side or backside of an integrated circuit may be performed using a scanning probe system. The system may create access holes with smaller dimensions and facilitate nano-machining endpoint detection in some embodiments.
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| 申请公布号 |
US7183122(B2) |
申请公布日期 |
2007.02.27 |
| 申请号 |
US20040848925 |
申请日期 |
2004.05.19 |
| 申请人 |
INTEL CORPORATION |
发明人 |
DIBATTISTA MICHAEL;LIVENGOOD RICHARD H.;VARNER ELIZABETH B.;WHITE RANDALL C. |
| 分类号 |
H04L21/00;G01Q10/00;G01Q80/00;H01L21/66;H01L21/768 |
主分类号 |
H04L21/00 |
| 代理机构 |
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