发明名称 Using selective deposition to form phase-change memory cells
摘要 A phase-change memory cell may be formed by selectively depositing the lower electrode in the phase-change memory pore. Thereafter, an adhesion-promoting material may be selectively deposited on the selectively deposited lower electrode and the upper surface surrounding the pore. Through the use of selective deposition techniques, the adhesion-promoting material can be positioned where needed and the lower electrode may be defined in a fashion that may reduce shunting current, reduce device current requirements, and increase dynamic range in some embodiments.
申请公布号 US7183567(B2) 申请公布日期 2007.02.27
申请号 US20030369008 申请日期 2003.02.19
申请人 INTEL CORPORATION 发明人 CHIANG CHIEN
分类号 H01L29/04;H01L45/00 主分类号 H01L29/04
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