发明名称 |
Shadow mask and method for producing a shadow mask |
摘要 |
The disclosed device is directed towards a shadow mask for ion beams comprising a silicon wafer with a hole pattern arranged therein, wherein the silicon wafer is provided at a side confronting the incident ion beams with a metallic coating which stops the ion beams and dissipates heat, wherein an apertured region of the silicon wafer has a thickness from about 20 mum to about 200 mum and apertures in the shadow mask have lateral dimensions from about 0.5 mum to about 3 mum.
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申请公布号 |
US7183043(B2) |
申请公布日期 |
2007.02.27 |
申请号 |
US20030344710 |
申请日期 |
2003.10.10 |
申请人 |
UNIVERSITAT KASSEL |
发明人 |
MEIJER JAN;STEPHAN ANDREAS;WEIDENMULLER ULF;RANGELOW IVO |
分类号 |
G03C5/00;G03F1/00;G03F1/20 |
主分类号 |
G03C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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