发明名称 |
Channel spark source for generating a stable focused electron beam |
摘要 |
In a channel spark source triggered by gas discharge for generating a stable focused electron beam, a gas supply for a hollow cathode thereof is provided which generates in the hollow cathode a pressure differential so that the multiplication of charge carriers in a trigger plasma of a trigger plasma source connected to the hollow cathode provides for a reliable gas discharge and the formation of a stable electron beam which exits the arrangement and which does not damage the internal passages of the arrangement.
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申请公布号 |
US7183564(B2) |
申请公布日期 |
2007.02.27 |
申请号 |
US20040915834 |
申请日期 |
2004.08.11 |
申请人 |
FORSCHUNGSZENTRUM KARLSRUHE GMBH |
发明人 |
SCHULTEISS CHRISTOPH;BUTH LOTHAR-HEINZ-OTTO |
分类号 |
C23C14/30;H01J17/26;H01J1/02;H01J3/02;H01J37/077;H01J61/28;H05H1/24;H05H9/00 |
主分类号 |
C23C14/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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