| 发明名称 |
Micro mirror unit and method of making the same |
| 摘要 |
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
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| 申请公布号 |
US2007041080(A1) |
申请公布日期 |
2007.02.22 |
| 申请号 |
US20060589075 |
申请日期 |
2006.10.30 |
| 申请人 |
FUJITSU LIMITED, LTD. |
发明人 |
MIZUNO YOSHIHIRO;UEDA SATOSHI;TSUBOI OSAMU;SAWAKI IPPEI;OKUDA HISAO;KOUMA NORINAO;SONEDA HIROMITSU;YAMAGISHI FUMIO |
| 分类号 |
G02B26/00;B81B3/00;B81C1/00;G02B26/08 |
主分类号 |
G02B26/00 |
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