UPPER ELECTRODE UNIT AND PLASMA PROCESSING APPARATUS,申请号KR20050056730-传众专利搜索

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发明名称	UPPER ELECTRODE UNIT AND PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR100686284(B1)	申请公布日期	2007.02.22
申请号	KR20050056730	申请日期	2005.06.29
申请人		发明人
分类号	H01L21/205;H01L21/3065	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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