| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device that can be machined relatively easily and has superior handleability while preventing the influence by thermal expansion. <P>SOLUTION: When heat is generated by a motor M by drive, a base 1 and a slider stage 4 are heated by radiant heat, or the like. However, the linear expansion coefficient in both of them are set equally, thus preventing strain by the thermal expansion. A work stage 5 is arranged while being separated by the slide stage 4 to a heat source, thus preventing direct heating due to the radiant heat. For heat conducted from the heat source, the slider stage 4 is connected to the work stage 5 through a post 6 whose sectional area is small, thus reducing the quantity of heat to be conducted, and restraining temperature rise in the work stage 5 since thermal conductivity is low in the post 6. <P>COPYRIGHT: (C)2007,JPO&INPIT |
