MANUFACTURING METHOD FOR PATTERN FORMING BODY AND MANUFACTURING APPARATUS FOR PATTERN FORMING BODY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a pattern forming body and a manufacturing apparatus for the pattern forming body with which a characteristic change pattern can be formed to an objective pattern shape with high accuracy even when the pattern forming bodies are continuously manufactured.

SOLUTION: A photocatalyst-containing layer side substrate 3 has a photocatalyst-containing layer 2 which is formed on a base material 1 and contains at least a photocatalyst. The photocatalyst-containing layer 2 and a substrate 4 for pattern formation whose surface characteristic is changed by the action of the photocatalyst associated with energy irradiation are arranged to face each other. The characteristic change pattern whose characteristic is changed by irradiating the photocatalyst-containing layer 2 with energy is formed on a surface of the substrate 4 for pattern formation to form a pattern forming body. In the manufacturing method for the pattern forming body, a plurality of the pattern forming bodies are manufactured by repeating a pattern forming step plural times and an adherent material removing step for removing an adherent material adhered to the photocatalyst-containing layer 2 is carried out between a plurality of pattern forming steps.

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