| 摘要 |
A minute regulation apparatus of a transfer table is provided to allow axial movement of a ball screw in a coupling to which a ball screw and a servo motor are coupled by regulating a thrust pressure applied in the axial direction of a second oil positive pressure bearing by using a variable capillary mechanism, thereby improving the preciseness of position determination. In a minute regulation apparatus for a transfer table, an oil positive pressure bearing increases the preciseness of position determination by regulating a thrust pressure in the axial direction of a ball screw by a bearing of a coupling. The oil positive pressure includes a collar, pocket bodies(421,422), and a bearing installation space(426). The collar is a piston provided in a shaft of an end portion of the ball screw. The pocket bodies are installed on both sides of the collar of the ball screw and a plurality of oil pockets are formed in the pocket bodies. The bearing installation space is formed by penetrating an end portion of the ball screw and the collar and the pocket bodies of the ball screw are accommodated and sealed in the bearing installation space.
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