发明名称 FERROELECTRIC MEMORY DEVICE AND METHOD OF MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a ferroelectric memory device which can be manufactured with high accuracy, and a method of manufacturing the same. SOLUTION: A first electrode 132 is formed on a surface of the base 110, a ferroelectric film 234 is formed on the first electrode 132, and a first region 224 is formed on an upper surface of the ferroelectric film 234. A second region 226 is formed on surfaces of the base 110 and the ferroelectric film 234 excluding the upper surface of the ferroelectric film 234. A second electrode 236 is formed in the first region 234 by forming a layer of an electrode material on the base 110 on which the first electrode 132 and the ferroelectric film 234 are formed. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007049174(A) 申请公布日期 2007.02.22
申请号 JP20060249336 申请日期 2006.09.14
申请人 SEIKO EPSON CORP 发明人 SHIMODA TATSUYA;NISHIKAWA HISAO
分类号 H01L21/8246;C23C16/04;H01L21/312;H01L21/316;H01L27/105;H01L27/28;H01L51/05 主分类号 H01L21/8246
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