| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano tweezers device, accurately gripping and releasing a micro sample. SOLUTION: Fixed electrodes 5a, 5b and movable electrodes 6a, 6b constituting electrostatic actuators 4a, 4b of a nano tweezers 1 are all shaped like comb teeth, and disposed opposite to each other so that a plurality of comb teeth mesh with each other. The fixed electrodes 5a, 5b are fixed to a pedestal 10, and arms 3a, 3b and the movable electrodes 6a, 6b are elastically supported by support parts 7a, 7b and arm support parts 9a, 9b. A storage part 40b stores a voltage output pattern corresponding to the elastic characteristic of the respective arms 3a, 3b. A driving voltage is applied between the electrostatic actuators 4a, 4b according to the voltage output pattern, thereby driving the arms 3a, 3b bilaterally symmetrically. COPYRIGHT: (C)2007,JPO&INPIT
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