| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment method and device for accurately aligning first and second transparent substrates with each other at a low cost, the transparent substrates facing each other with a frame material in between. SOLUTION: A tool 7 is inserted between the first transparent substrate 1 having an alignment mark 6a on its upper surface side and the second transparent substrate 2 having an alignment mark 6b on its lower surface side. Alignment marks 6c and 6d corresponding to the alignment marks on the transparent substrates 1 and 2, respectively, are formed on the lower and upper surface sides, respectively, of the tool 7. The tool 7 and the transparent substrate 1 are positioned by aligning the alignment mark 6c formed on the lower surface side of the tool 7 with the alignment mark 6a on the first transparent substrate while positioning the tool 7 and the transparent substrate 2 by aligning the alignment mark 6d formed on the upper surface side of the tool 7 with the alignment mark 6b on the transparent substrate 2. COPYRIGHT: (C)2007,JPO&INPIT
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