摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal device which has high light tightness and can suppress deterioration of an alignment film, a manufacturing method for the liquid crystal device, and a projection type display device. SOLUTION: The alignment film 16 is formed of a metal oxide film 31 and then has high light tightness. Further, N atoms 32 which are less hydrated than a hydroxy group are bonded to at least some of Si atoms 33 on the surface of the metal oxide film 31 not through an oxygen atom, so a hydroxy group is prevented from being formed on the surface of the metal oxide film 31. Consequently, hydration of the surface of the alignment film 16 decreases and water becomes harder to stick on the surface, so that deterioration of the alignment film 16 can be suppressed. COPYRIGHT: (C)2007,JPO&INPIT
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