| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for loading and unloading semiconductor workpieces which accurately locates a semiconductor workpiece in a processing station, avoids the problem of a displacement of a semiconductor workpiece caused by an up and down movement of an injector pin, and loads and unloads a semiconductor workpiece at high-speed, and also to provide a method of loading and unloading semiconductor workpieces using the device. <P>SOLUTION: In the processes of loading and unloading a semiconductor workpiece using a means for pushing up the semiconductor workpiece through the process of lifting a processing station 31, the semiconductor workpiece is securely held to stay in an original location without any vertical rise and fall in conjunction with an injector pin 21. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
