| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high frequency induction heat plasma torch in which adhesion of a solid material synthesized with the high frequency induction plasma torch on the inside of the plasma torch is suppressed, and the synthesized solid material is effectively deposited on relatively thin target bars; and to provide a method of synthesizing the solid material. <P>SOLUTION: The high frequency induction heat plasma torch has a quadruple pipe structure comprising, in the order from the innermost, a first pipe 13 as a flow channel 17 for a raw gas and an inert carrier gas, a second pipe 14 as a flow channel 18 for an inert gas, a third pipe 15 as a flow channel 19 for a sub-raw material optionally diluted with an inert gas, and a fourth pipe 16 as a flow channel 20 for cooling water. The first pipe 13 and the second pipe 14 are arranged backward from the third pipe 15 and the fourth pipe 16. A high frequency coil 21 is arranged outside the fourth pipe 16 and at a front part of the front ends of the first pipe 13 and the second pipe 14. <P>COPYRIGHT: (C)2007,JPO&INPIT |
