发明名称 IMAGE DEFECT INSPECTION DEVICE, IMAGE DEFECT INSPECTION SYSTEM, AND IMAGE DEFECT INSPECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To reduce the generation of a pseudo-defect when a lightness difference exists between two compared images, in an image defect inspection device and a method for detecting a difference between fellow picture elements corresponding to the two images to detect a picture element portion as a defect when the difference exceeds a detection threshold. <P>SOLUTION: The image defect inspection device 10 of the present invention is provided with a correlation value calculating means 20 for calculating a correlation value between a differential image in the two collated images and at least one out of the two images, and the detection of the defect is restrained in response to an increase of the correlation value. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007047020(A) 申请公布日期 2007.02.22
申请号 JP20050231745 申请日期 2005.08.10
申请人 TOKYO SEIMITSU CO LTD 发明人 ISHIKAWA AKIO
分类号 G01N21/956;G01B11/24;G06T1/00;H01L21/66 主分类号 G01N21/956
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