| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma surface treatment method which forms a single film, a composite film, and a laminated film highly purely and smoothly without being adversely affected by droplets by using a vacuum arc plasma at least in part, to provide a plasma treatment apparatus, and to provide a workpiece treated by using the same. <P>SOLUTION: Two types of plasmas, a first plasma 16 and a second plasma 17, are used. The respective plasmas 16 and 17 are vacuum arc plasmas generated by performing vacuum arc discharge in arc discharge parts set in a vacuum atmosphere in a first plasma generation part 2 and a second plasma generation part 3 and are led to a common transport duct 10 through first and second plasma guide paths 22 and 23. While the timing of leading the first and second plasmas 16 and 17 to the common transport duct 10 is controlled, the surface of each workpiece W inside a plasma treatment part 1 is subjected to surface treatment such as the formation of a laminated film. The angles at which the plasma guide paths 22 and 23 feed their respective plasmas 16 and 17 are set to be acute with respect to the transport direction of the common transport duct 10. <P>COPYRIGHT: (C)2007,JPO&INPIT |
