| 摘要 |
<P>PROBLEM TO BE SOLVED: To apply deformation processing to a plate-shaped structure without producing any cracks and causing a change in a relative position of an object to be placed if any. <P>SOLUTION: A deformation processing apparatus of a plate-shaped structure comprises: a deformation processing member 1 having an upper surface with which a one main surface of a plate-shaped structure 12 can make contact, and having an opening at positions corresponding to a central part and peripheral part of the plate-shaped structure 12; an attraction pad 2 disposed at each opening for attracting the plate-shaped structure 12; and a negative pressure source communicated with a communication hole 9 for supplying negative pressure to the interior of the attraction pad 2. The plate-shaped structure 12 is placed on the attraction pad 2 protruded from the upper surface, and negative pressure is supplied to the attraction pad 2 to cause the plate-shaped structure 12 to attract the attraction pad 2. Thereafter, the attraction pad 2 is withdrawn by the negative pressure from the negative pressure source until the attraction pad 2 and the upper surface are substantially flush with each other, and the plate-shaped structure 12 is pushed against the upper surface to correct the plate-shaped structure 12 to a flat plane shape. <P>COPYRIGHT: (C)2007,JPO&INPIT |
