Verfahren zur Herstellung einer keramischen Membranstruktur

摘要

A method for forming a ceramic diaphragm structure includes the steps of: a) providing a laminate, comprising: i) a ceramic green substrate having at least one window therethrough and a plurality of layers; and ii) a thin ceramic green sheet having at least one layer superposed on the ceramic green substrate to cover the at least one window; and b) firing the laminate so that the ceramic green sheet provides a diaphragm portion protruding in a direction away from the at least one window; wherein the ceramic green substrate and the ceramic green sheet satisfy the formulae: 1) S(substrate) - S(sheet> >/= - 0.08äT70(substrate) - T70(sheet)ü - 1 2) 0 (wherein N denotes the number of layers constituting the ceramic green substrate, T70(substrate)n denotes a mid-sintering temperature ( DEG C) of a layer positioned in the nth place from the bottom of the laminate in the ceramic green substrate having the ceramic green sheet thereon, tn and tn+1 denote distances from the lower and upper surfaces, respectively, of the layer positioned in the nth place to a neutral line of the substrate after firing the unitary laminate, using (-) for a surface under the neutral line and (+) for a surface over the neutral line.), and an average shrinkage-rate difference of the ceramic green substrate, shown by the following formula, is smaller than 0: $(wherein\; N\; denotes\; the\; number\; of\; layers\; constituting\; the\; ceramic\; green\; substrate,\; S(substrate)n\; denotes\; a\; shrinkage\; rate\; (\%)\; of\; a\; layer\; positioned\; in\; the\; nth\; place\; from\; the\; bottom\; of\; the\; laminate\; in\; the\; ceramic\; green\; substrate\; having\; the\; ceramic\; green\; sheet\; thereon,\; and\; tn\; and\; tn+1\; denote\; distances\; from\; the\; lower\; and\; upper\; surfaces,\; respectively,\; of\; the\; layer\; positioned\; in\; number\; n\; place\; to\; a\; neutral\; line\; of\; the\; substrate\; after\; firing\; the\; unitary\; laminate,\; using\; (-)\; for\; a\; surface\; under\; the\; neutral\; line\; and\; (+)\; for\; a\; surface\; over\; the\; neutral\; line.).$